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SEMICON Russia 2012 (x)
Optatova 37, Brno, CZ-63700
Manufacturer of batch horizontal furnaces for semiconductor and PV industries. Supported processes for PV industry include POC13 and BBr3 diffusion, batch PE CVD passivation (AR coating) and both wet and dry oxidation. Gas source systems for ammonia, silane, nitrogen, oxygen and many other high purity gases. Our installations are in major russian semiconductor companies and R&D institutes.
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